#COMPLEMENTARY METAL OXIDE SILICON PDF#

238000002955 isolation Methods 0.000 claims abstract description 92.239000000758 substrate Substances 0.000 claims abstract description 98.239000004020 conductor Substances 0.000 title claims description 208.229910052751 metal Inorganic materials 0.000 title claims description 224.150000004706 metal oxides Chemical class 0.000 title claims abstract description 14.229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 14.230000000295 complement Effects 0.000 title claims abstract description 14.239000004065 semiconductor Substances 0.000 title claims abstract description 318.Assignors: WILMINGTON TRUST, NATIONAL ASSOCIATION Status Active legal-status Critical Current Anticipated expiration legal-status Critical Links RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: WILMINGTON TRUST, NATIONAL ASSOCIATION Assigned to GLOBALFOUNDRIES U.S. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assigned to WILMINGTON TRUST, NATIONAL ASSOCIATION reassignment WILMINGTON TRUST, NATIONAL ASSOCIATION SECURITY AGREEMENT Assignors: GLOBALFOUNDRIES INC. Assignors: INTERNATIONAL BUSINESS MACHINES CORPORATION Assigned to GLOBALFOUNDRIES INC. 2 LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHIDAMBARRAO, DURESETI, Greene, Brian J., HENSON, WILLIAM K., LIANG, Yue, NARASIMHA, SHREESH, YU, XIAOJUN, KWON, UNOH Publication of US20130168776A1 publication Critical patent/US20130168776A1/en Priority to US14/292,312 priority patent/US9082877B2/en Publication of US8803243B2 publication Critical patent/US8803243B2/en Application granted granted Critical Assigned to GLOBALFOUNDRIES U.S. Application filed by International Business Machines Corp filed Critical International Business Machines Corp Priority to US13/342,435 priority Critical patent/US8803243B2/en Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION reassignment INTERNATIONAL BUSINESS MACHINES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Family has litigation First worldwide family litigation filed litigation Critical (B2) 'Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License. Original Assignee International Business Machines Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Henson Unoh Kwon Shreesh Narasimha Xiaojun Yu Current Assignee (The listed assignees may be inaccurate. ( en Inventor Yue Liang Dureseti Chidambarrao Brian J.

Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Active Application number US13/342,435 Other versions US20130168776A1

#COMPLEMENTARY METAL OXIDE SILICON PDF#

Google Patents Complementary metal oxide semiconductor (CMOS) device having gate structures connected by a metal gate conductorĭownload PDF Info Publication number US8803243B2 US8803243B2 US13/342,435 US201213342435A US8803243B2 US 8803243 B2 US8803243 B2 US 8803243B2 US 201213342435 A US201213342435 A US 201213342435A US 8803243 B2 US8803243 B2 US 8803243B2 Authority US United States Prior art keywords gate metal layer semiconductor conductor layer Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US8803243B2 - Complementary metal oxide semiconductor (CMOS) device having gate structures connected by a metal gate conductor US8803243B2 - Complementary metal oxide semiconductor (CMOS) device having gate structures connected by a metal gate conductor

Complementary metal oxide silicon